CHALLENGE THE NEW CHANGE THE WORLD
PLASMA SOURCE | 2.45 GHz 700W |
---|---|
SUBSTRATE SIZE | 70 x 70 mm (water cool) |
GAS LINE (MFC OPTION) | METERING ONE LINE (Ar ,O2, N2,CF4…etc) |
VACUUM PUMPING PORT | NW25 |
DIMENSIONS | W500 x D515 x H490 |
※ Move left and right to check the contents.