This vacuum deposition equipment is a physical vapor deposition equipment that deposits a metal thin film by placing the material to be deposited on the W or Mo Boat in a high vacuum and allowing the material to evaporate by flowing a high current to the Boat.
Generally, it is widely used for depositing electrode materials such as aluminum, gold, and silver on the specimen. Depending on how the material to be deposited is heated, it can be divided into thermal evaporation and e-beam evaporation. Oxygen or nitrogen) can also be implanted to deposit oxide or nitride thin films.
It is also possible to deposit a thin film while maintaining an appropriate substrate temperature using a heater.
