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MINISERIES

MINI SPUTTERING – WATER COOL TYPE

  • Because the magnet and water are completely separated, there is no change of condition or repair due to magnet oxidation.
  • RF is available.
  • Substrate Heater Option(Max 1,000°C)
  • ₩ 4,600,000

SPECIFICATION

SPUTTER TYPE Sputter down type with shutter
TARGET SIZE Ø2″ X 1/4″ thickness (water cool)
VACUUM GAUGE Pirani type
PLASMA SOURCE DC 400W
GAS CONTROL Metering valve
VACUUM PUMPING PORT NW25
DIMENSIONS W470 x D270 x H250

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